Spin speed ( rpm) PMMA 950K A2. We stock two different Molecular Weights of PMMA 495K 950K - - they are NOT interchangeable. Good adhesion to most surfaces. What is the datasheet difference between your PMMA A resists and PMMA C resists? I also was under the impression that a bilayer. Date: 06 November CHEMICAL NAME: Organic Polymer Solution TRADE NAME: 950 PMMA Series Resists in Anisole. Honolulu | United States. Spin pre- bake First layer 950k – Copolymer ( spin speedrpm 60 sec.PMMA is most commonly used as a high resolution positive resist for direct write e- beam as well as x- ray and deep pmma UV microlithographic processes. 5) MAA EL11) 950k PMMA A3 Storage 10- 27 ºC Surface Preparation In general no surface preparation aside from normal cleaning is necessary. Two of the most common trade names are Plexiglas it is also commonly known as acrylic glass, Lucite , acrylic perspex. 8% of BPO( benzoyl peroxide) to improve adhesion datasheet M. technical product information 950k fujifilm electronic materials.
1 Store PMMA resist 950k upright in original containers in the photoresist storage cabinet above 10C ( 50F). The two can be used together in a bi- layer process to provide a good undercut profile for liftoff. 950k Technical DaTa SheeT acrylic ( PMMa) ( Polymethyl- Methacrylate) An amorphous transparent , colorless high- performance thermoplastic pmma which is hard , rigid but also refractory notch- sensitive. Our PMMA A resists are formulated in anisole, while our PMMA pmma C resists are formulated in chlorobenzene. rpm thickness ang. PMMA Process Information NOTE! ( datasheet PMMA) is the most popular pmma e- beam resist offering very high- resolution ease. Robert White, Mechanical Engineering ( x72210).
How can I achieve more pmma pmma reliable liftoff for PMMA bilayer process? 4786 pmma Language English Creator. 4 Pre Bake Hot pmma plate: 180C forsec OR. ANT ATR451704v01 0896 Datasheet. Link to PMMA manufacturer’ s data sheet:. ( they both appear to spin on at ~ 70nm according to the MicroChem datasheet). A cycle of this fabrication based on photolithography and 950k lift- off was repeated to form oxide layer with opening pmma bottom electrode. pmma 495K generally has lower dose. Resist available at TNFC Copolymer ( MMA ( 8.
We do not have any 950k PMMA dissolved in chlorobenzene. a 950k thin layer of PMMA pmma - 950K layer. To make Ni catalyst with diameter of datasheet 100nm E- beam resist, E- beam lithography was carried out using JEOL JBX- 9300FS with 400 uC/ cm2 dose after PMMA A3 950K was coated to make 90nm thickness. PMMA is also used as a protective. b) double PMMA layer. SAFETY datasheet DATA SHEET PAGE 2 of 8 Rev. Yes possible: PMMA is often used as a mask. 950k All of our PMMA is in Anisole solvent. Resist available at TNFC 950k PMMA A3. Publication Date Genre non- fiction Holding Location University of South Florida Resource Identifier E14- SFE0004786 e14.
What is Acrylic ( PMMA), and What is it Used For? Acrylic is a transparent thermoplastic homopolymer known more commonly by the trade name “ plexiglass. ” The material is similar to polycarbonate in that it is suitable for use as an impact resistant alternative to glass ( particularly when the high impact strength of PC is not required). It was first produced in 1928 and was brought to market. NTNU NanoLab process database.
pmma 950k datasheet
Contribute to NanoLabStaff/ nanolab development by creating an account on GitHub. Registry Number: Molecular Formula: ( C5H8O2) x Chemical Name: 2- Propenoic acid, 2- methyl-, methyl ester, homopolymer Show Synonyms.